Wafer-scale Fabrication and Modification of Silicon Nano-Pillar Arrays for Nanoelectronics, Nanofluidics and Beyond

Dirk Jonker,Lucas Kooijman,Yasser Pordeli,Bernhard Van der Wel,Erwin Berenschot,Bjorn Borgelink,Hai Le-The,Meint de Boer,Jan Eijkel,Ray Hueting,Roald Tiggelaar,Arie van Houselt,Han Gardeniers,Niels Tas

International Journal of Nanotechnology（2020）

引用 4|浏览17

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3D nanofabrication,3D nanoelectronics,nanofluidics,electro-osmotic pump,nanoelectronics,additive hybrid lithography,SiNW,silicon nanowires,continuous mode,mixed-mode,reactive ion etching

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