A ridge waveguide constructed by H+ implantation and precise diamond blade dicing in high-gain Nd3+-doped laser glass

Ion implantation and precise diamond blade dicing are amazing tools allowing the accurate formation of waveguide structures. In this work, we report on the fabrication and assessment of a ridge waveguide in the high-gain Nd3+-doped laser glass by the 400-keV H+-ion implantation with a fluence of 8.0 × 1016 ions/cm2 and the precise diamond blade dicing at a rotating speed of 2.0 × 104 rpm. The relative atom displacement induced by the proton implantation was simulated by the SRIM 2013. The cross section of the two-dimension structure was captured by a microscope and its lateral dimensions were 3.75 μm × 10 μm. The optical confinement of the ridge waveguide was recorded by the technique of the end-face coupling and its propagation loss was about 3.9 dB/cm at 976 nm. The ridge waveguide supported mono-mode at 976 nm can serve as a photonic device.