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Single Crystal Diamond Growth by MPCVD at Subatmospheric Pressures

A. P. Bolshakov,V. G. Ralchenko,Guoyang Shu,Bing Dai,V. Yu. Yurov,E. V. Bushuev,A. A. Khomich,A. S. Altakhov,E. E. Ashkinazi,I. A. Antonova,A. V. Vlasov,V. V. Voronov, Y. Y. Sizov,S. K. Vartapetov,V. I. Konov,J. Zhu

Materials Today Communications（2020）

Cited 18|Views43
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Key words
Single crystal diamond,Microwave plasma CVD,Optical emission spectroscopy
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