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LiDAR Beamsteering by Digitally Switched MEMS Gratings on a Silicon Photonics Platform

S. J. Spector, E. H. Cook,M. G. Moebius, F. A. Baruffi, M. G. Bancu, L. D. Benney,S. J. Byrnes,J. P. Chesin,S. J. Geiger,D. A. Goldman, A. E. Hare,B. F. Lane, W. D. Sawyer, C. R. Bessette

Conference on Lasers and Electro-Optics（2020）

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Abstract
A new method for solid-state beamsteering using MEMS grating switches integrated on a Si-PIC has been demonstrated. This method provides fast random access switching, simple digital control, extremely low side-lobes, and is scalable to large arrays, large apertures, and long ranges.
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Key words
digitally switched MEMS gratings,silicon photonics platform,solid-state beamsteering,Si-PIC,fast random access switching,side-lobes,LiDAR beamsteering,MEMS grating switches,digital control,Si
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