Fabrication of an Adaptive Micro Fresnel Mirror Array

We present in this paper the design and fabrication of a miniaturized array of piezoelectrically tunable Fresnel mirrors, which can be used to generate propagation invariant and self-healing interference pattern. The mirrors are actuated using a circular piezoelectric actuator, and the resulting change in the tilting angles of the mirrors changes the widths of the interference patterns generated. The array consists of four Fresnel mirrors arranged in 2 x 2 configuration with each mirror having an area of 2 x 2 mm(2). The achievable mirror angle ranges from -10 to +10 mrad.