Processing of graphene on 300mm Si wafers in a state-of-the-art CMOS fabrication facility

V. Kaushik, N. Agbodo, H. Chung,M. Hatzistergos, B. Ji, R. Khare, T. Laursen, D. Lovell, A. Mesfin,T. Murray,S. Novak, H. Stamper, D. Steinke, S. Vivekanand, T. Vo, M. Passaro,M. Liehr

SOLID STATE TECHNOLOGY（2015）

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