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Wireless Passive LC Temperature and Strain Dual-Parameter Sensor

Micromachines(2021)

引用 11|浏览8
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摘要
There is an increasing demand for bearing temperature and strain monitoring in high-speed rotating systems. This study proposes a new multiresonance, multiplexing, wireless, passive inductance capacitance (LC) temperature and strain sensor. The sensor has two capacitors connected at different locations (turns) on the same inductor to achieve simultaneous temperature and strain measurements. The plate capacitor is connected to the inner part of the inductor and the other interdigital capacitor is connected to the outer part of the inductor to form two LC loops. The structure of the sensor is optimized through High Frequency Structure Simulator (HFSS) simulations to realize frequency separation of the two parameters and avoid mutual interference between the two signals. The sensor is fabricated on a polyimide film using electroplating technology. The experimental results show that the temperature-strain sensor can operate stably from 25 degrees C to 85 degrees C with an average sensitivity of 27.3 kHz/degrees C within this temperature range. The sensor can detect strains in the range of 1000-5000 mu epsilon with a strain sensitivity of 100 Hz/mu epsilon at 25 degrees C. Therefore, the proposed wireless passive LC temperature-strain sensor exhibits stable performance. In addition, the use of a single inductor effectively reduces the sensor's area. The flexible substrate provides advantageous surface conformal attachment characteristics suitable for monitoring high-temperature rotating parts in adverse environments.
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关键词
temperature-strain sensor,wireless,rotating system
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