Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films

Sanjie Liu,Gang Zhao,Yingfeng He,Yangfeng Li,Huiyun Wei,Peng Qiu,Xinyi Wang,Xixi Wang,Jiadong Cheng,Mingzeng Peng,Francisco Zaera,Xinhe Zheng

APPLIED PHYSICS LETTERS（2020）

引用 12|浏览24

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关键词

sapphire surfaces,atomic layer deposition,gan,thin films,plasma-enhanced

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