Individually addressable Cantilever Arrays for Parallel Atomic Force Microscope
semanticscholar(2010)
摘要
Cantilever arrays probes with self-sensing and selfactuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an individual tip-sample distance control. The probe concept and fabrication is explained as well as the probe characteristics.
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