4H-Sic Surface Morphology after Al Ion Implantation and Annealing with C-cap.
Journal of microscopy（2020）
Key words
4H-SiC,AFM,annealing,correlation length,ion implantation,rms,roughness exponent,roughness
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined