Effect of TFT-LCD Developer Parameters on Halftone Thickness

The influence of concentration (mass fraction, C-1) and concentration of acid radical ion (mass fraction, C-2) of TFT - LCD developer on Halftone THK is researched, and the way to improve THK fluctuations is put forward. Firstly, the production conditions of lithography process are fixed, then the influence of THK with C-1 and C-2 is respectively tested using the single factor experimental method. Studies show that the changes of C-1 and C-2 will affect the developer's development ability and lead to the changes of THK. THK with C-1 and C-2 are both linear negative correlation. Secondly, according to the influence degree of C-1 and C-2 changes on THK, the formula corresponding relations between the two is established. The C-1 is adjusted through the system and then the C-2 fluctuations are improved. Lastly, the development ability and the THK fluctuations are stable through putting the formula into the system which make channel related incidence reduced to below 0.03% from more than 0.20%.