Athermal Silicon Ring Resonators with TiO2 Hybrid-Polymer Claddings

Tomohiro Kita,Manuel Mendez-Astudillo, Mieko Masaka,Freddy Susanto Tan,Okihiro Sugihara

2019 24th Microoptics Conference (MOC)（2019）

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摘要

Thermo-optic coefficients of organic-inorganic hybrid polymers with rutile-TiO ₂ nanoparticles were carefully estimated using SOI ring resonators. Athermal operation of the SOI ring resonators with TiO ₂ hybrid-polymer claddings was achieved. The hybrid-polymer cladding can be applied to diverse silicon waveguide structures to control the temperature dependence of silicon photonic devices.

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关键词

athermal silicon ring resonators,hybrid-polymer cladding,thermo-optic coefficients,organic-inorganic hybrid polymers,SOI ring resonators,athermal operation,rutile-TiO2 nanoparticles,diverse silicon waveguide structures,temperature dependence,silicon photonic devices,TiO2-Si

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