Surface Initiated Polymer Thin Films for the Area Selective Deposition and Etching of Metal Oxides

Thomas G. Pattison,Alexander E. Hess,Noel Arellano,Nicholas Lanzillo,Son Nguyen,Holt Bui,Charles Rettner,Hoa Truong,Alexander Friz,Teya Topuria, Anthony Fong,Brian Hughes,Andy T. Tek,Anuja DeSilva,Robert D. Miller,Greg G. Qiao,Rudy J. Wojtecki

ACS nano（2020）

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关键词

area selective deposition,atomic layer deposition,self-assembly,ring opening metathesis polymerization,surface initiated polymerization,vapor phase polymerization

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