Silicon Nitride Photonic Platform for Sensing Applications

This paper reports state-of-the-art values for a 200mm LPCVD silicon nitride platform in terms of low propagation loss 0.08dB/cm over a large wavelength range from 1550nm to 2150nm. This platform is specifically designed for sensing applications by providing a large oxide window opening to reveal the waveguide for interaction with a medium. Moreover, extra modules like reflector, heater and bond pads are added for more functionalities.