Effects of Doping on the Morphology and Infrared Radiative Properties of Black Silicon
2019 25th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC)（2019）
Key words
high absorptivity,noteworthy radiative properties,particular morphological features,statistical image processing,effective infrared sources,wafer-level cryogenic plasma processing,doping effects,infrared radiative properties,heavily doped black silicon,SEM,size 15.0 mum,Si
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