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Study of GaP Nucleation Layers Grown on Si by Plasma‐Enhanced Atomic Layer Deposition

Alexander S. Gudovskikh,Alexander. V. Uvarov,Ivan A. Morozov,Anton S. Bukatin,Artem I. Baranov,Dmitry A. Kudryashov,Nikolay A. Kalyuzhnyy,Sergey A. Mintairov,Vasily I. Zubkov,George E. Yakovlev,Jean-Paul Kleider

Physica status solidi A, Applications and materials science（2019）

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关键词
GaP,GaP,Si heterojunctions,plasma-enhanced atomic layer deposition,solar cells
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