ALD-RuO2 FUNCTIONALIZED GRAPHENE FET WITH DISTINCTIVE GAS SENSING PATTERNS

Takeshi Hayasaka,Vernalyn C. Copa,Lorenzo P. Lopez,Regine A. Loberternos,Laureen Ida M. Ballesteros,Albert Lin,Yoshihiro Kubota,Huiliang Liu,Arnel A. Salvador,Liwei Lin

2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（2019）

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关键词

4-dimentional physical properties vectors,16-dimensional characteristic gas sensing pattern,water vapor,methanol,multidimensional physical properties vectors,ALD,field effect transistors,atomic layer deposition,functionalized graphene FET,gas classification schemes,electron mobility characterizations,4D physical property vectors,16D characteristic gas sensing pattern,C-RuO2

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