Acoustic End Corrections for Micro-Perforated Plates.

Micro-perforated plates (MPPs) are acoustically important elements in micro-electro-mechanical systems (MEMS). In this work an analytical solution for perforated plates is combined with finite element method (FEM) to develop formulas for the reactive and resistive end effects of the perforations on the plate. The reactive end effect is found to depend on the hole radius and porosity. The resistive end effect is found to depend on hole radius only. FEM is also used to develop an understanding of the loss mechanism that corresponds to the resistive end effects. The developed models can be used in optimization studies of the MEMS and MPPs.