Evaluation of Ion/electron Beam Induced Deposition for Electrical Connection Using a Modern Focused Ion Beam System
Han-guk hyeonmigyeong hakoeji/Applied microscopy（2019）
关键词
Focused ion beam,Electron beam induced deposition,Ion beam induced deposition,Electrical resistance
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要