Improving Electrical Performance of Few-Layer MoS2 FETs via Microwave Annealing
IEEE Electron Device Letters(2019)
摘要
A few-layer molybdenum disulfide (MoS
2
) has attracted great attention because of its novel electrical and optoelectrical properties for devices. In this letter, we perform a systematic study on the evolution of the electrical performance of the few-layer MoS
2
field-effect transistors (FETs) under microwave annealing. As a result, obvious improvements on electrical properties are achieved for the sample annealed in N
2
ambience between 420 and 840 W. The on/off current ratio of
${\sim } {8.34}\times {10}^{ {8}}$
and the hysteresis of 2.1 V, which are ~150 times higher and ~2.1 times smaller compared with that of fabricated MoS
2
FET, respectively. The proposed technique provides a new method to approach high-performance few-layer MoS
2
FETs with minimized parasitic resistances.
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关键词
Molybdenum,Sulfur,Annealing,Hysteresis,Performance evaluation,Microwave FETs
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