RFID-based Wireless Sensor Network for Semiconductor Manufacturing Equipment to enable Predictive Maintenance

Thomas Moldaschl,Ales Travnik, Albert Frank,Jochen Bardong, Heinz Cramer, Herbert Kastberger, Matthias Weitlaner, Michael Jerne, Alexey Nazarov,Christina Hirschl

Smart Systems Integration; 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems（2019）

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