The dynamics of the electron impact excitation in pulse-modulated Ar/O2 inductive coupled plasmas.Fei Gao,Chan Xue,Yu-Ru Zhang,You-Nian WangBulletin of the American Physical Society(2018)引用 23|浏览6暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要