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High Heat Flux Removal Using Optimized Microchannel Heat Sink

2018 24rd International Workshop on Thermal Investigations of ICs and Systems (THERMINIC)(2018)

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Key words
advanced CMOS compatible silicon fabrication,high aspect ratio microchannels,thermal test chip,low thermal contact resistance,low total thermal resistance,high heat flux removal,optimized microchannel heat sink,silicon-based compact microchannel heat sink,high heat flux dissipation,silicon-based thermal test chip,heater die,pump power,cooling performance,3D modelling,size 160.0 mum,size 32.0 mum,wavelength 5.0 mm,wavelength 9.0 mm,size 5.0 mm,Cu-SnAu
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