Magnetic field influence on ionization zones in high-power impulse Magnetron Sputtering

Priya Raman,Matthew Cheng,Justin Weberski,Wenyu Xu,Thomas J. Houlahan,Jose Rivera,Rui Su,Ivan Shchelkanov,David N. Ruzic

Vacuum（2018）

引用 5|浏览16

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ionization zones,magnetic field influence,magnetic field,magnetron,high-power

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