Magnetic Calorimeter Arrays with High Sensor Inductance and Dense Wiring

We describe prototype arrays of magnetically coupled microcalorimeters fabricated with an approach scalable to very large format arrays. The superconducting interconnections and sensor coils have sufficiently low inductance in the wiring and sufficiently high inductance in the coils in each pixel, to enable arrays containing greater than 4000 sensors and 100,000 X-ray absorbers to be used in future astrophysics missions such as Lynx. We have used projection lithography to create submicron patterns (e.g., 400 nm lines and spaces) in our niobium sensor coils and wiring, integrated with gold–erbium sensor films and gold X-ray absorbers. Our prototype devices will explore the device physics of metallic magnetic calorimeters as feature sizes are reduced to nanoscale.