The Impact of the Scanning XPS Microprobe on Industrial Applications of X-ray Photoelectron Spectroscopy

We will review the evolution of x-ray photoelectron spectroscopy (XPS / ESCA) instrumentation and applications that led to the development of the scanning XPS microprobe, describe its unique capabilities, and how they have impacted the use of XPS for industrial applications. (C) 2018 Elsevier B.V. All rights reserved.