Design and Pitch Scaling for Affordable Node Transition and EUV Insertion Scenario

Ryoung-han Kim,Julien Ryckaert,Praveen Raghavan,Yasser Sherazi,Peter Debacker,Darko Trivkovic,Werner Gillijns,Ling Ee Tan,Youssef Drissi,Victor Blanco,Joost Bekaert,Ming Mao,Stephane Lariviere,Greg McIntyre

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE（2017）

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关键词

DTCO,Scaling booster,EUV,SAQP,standard cell,cost of ownership,OPC

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