Optimization of Capacitive Membrane Sensors for Surface-Stress-Based Measurements
IEEE Sensors Journal(2017)
摘要
Surface stress-based measurement is a relatively new mechanism in biological and chemical sensing. The viability of this mechanism depends on the maximum sensitivity, accuracy, and precision that can be achieved with these sensors. In this paper, an analytical approximate solution and a finite-element model are employed to describe the electromechanical behavior of a surface stress-based sensor wi...
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关键词
Stress,Radio frequency,Substrates,Sensitivity,Capacitive sensors,Stress measurement
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