Fabrication of Three-Dimensional Plasmonic Structure and Multilayer Metamaterials by Femtosecond Laser-Induced Forward Transfer

Cheng Hung Chu,Ming Lun Tseng,Hui Jun Wu,Pin Chieh Wu,Wei-Yi Tsai,Mu-Ku Chen,Hung-I Lin,Hsiang-Chu Wang,Ching-Fu Chen,Jia-Wern Chen,Ting-Yu Chen,Yi-Hao Chen,Pei Ru Wu,Din Ping Tsai

2016 PROGRESS IN ELECTROMAGNETICS RESEARCH SYMPOSIUM (PIERS)（2016）

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three-dimensional plasmonic structure fabrication,multilayer metamaterial fabrication,femtosecond laser-induced forward transfer,plasmonic metamaterials,extraordinary optical properties,negative refraction,focused ion beam lithography,FIB lithography,electron beam lithography,EBL,three-dimensional plasmonic structures,alignment error,laser direct writing,LDW,SPP wave scattering,backward scattering,forward scattering,surface plasmonic waves,gold nanobumps,three-dimensional light manipulation,tightly contacted donor-receiver pair,multilayer split resonant rings,square-shaped multilayer resonant cavities,contact-mode LIFT,ablation,plasmonic modes,integrated optics,optical nonlinearities,luminescence enhancement,Au

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