Parallel Arrays of Sub-10 Nm Aligned Germanium Nanofins from an in Situ Metal Oxide Hardmask Using Directed Self-Assembly of Block CopolymersCian Cummins,Anushka Gangnaik,Roisin A. Kelly,Alan J. Hydes,John O'Connell,Nikolay Petkov,Yordan M. Georgiev,Dipu Borah,Justin D. Holmes,Michael A. MorrisCHEMISTRY OF MATERIALS(2015)引用 24|浏览34暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要