Wet-chemical etching of SrMoO3 thin films

SrMoO3 is a perovskite oxide material with very high electrical conductivity, exhibiting great potential for integration into electronic devices. Here, we present a method for controlled wet-chemical etching of SrMoO3 thin films using alkaline solutions. The etching process includes superficial oxidation of the Mo4+ of the SrMoO3 to Mo6+ followed by solvation of the molybdate and strontium ions. The SrMoO3 etching rate can be widely tuned by adjusting the amount of the oxidizing additives in the solution.