Atomic Resolution Quality Control for Fin Oxide Recess by Atomic Resolution Profiler

Tae-Gon Kim,Heon-Yul Ryu,Karine Kenis,Ah-Jin Jo,Sang-Joon Cho,Sang-Il Park,Sebastian Schmidt,Bernd Irmer

Diffusion and defect data, solid state data Part B, Solid state phenomena/Solid state phenomena（2016）

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关键词
FinFET,Oxide recess,Atomic resolution profiler,In-line monitoring,Metrology,Atomic force microscopy
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