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Investigation Of Error- And Drift Sources In A Capacitive Sensor System For Sub-Nanometer Displacement Measurement

Roumen Nojdelov,Dirk Voigt, Arthur S. van de Nes,Stoyan Nihtianov

2015 9TH INTERNATIONAL CONFERENCE ON SENSING TECHNOLOGY (ICST)（2015）

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Key words
capacitive sensor, displacement measurement, nonlinearity, error correction, sub-nanometer uncertainty
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