A Parylene Micropipette Array for Enabling Simultaneous Detection of Different Target Analytes on a CMOS Sensor Array
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)（2016）
关键词
parylene micropipette array,target analytes detection,CMOS-based Hall sensor array,capture antibodies,SoC chip,embedded parylene channel fabrication process,functionalized magnetic beads
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