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Temperature Control of Micro Heater Using Pt Thin Film Temperature Sensor Embedded in Micro Gas Sensor

Jun-gu Kang,Joon-Shik Park,Kwang-Bum Park, Junho Shin, Eung-An Lee, Sangsoo Noh,Hoo-Jeong Lee

Micro and Nano Systems Letters(2017)

引用 20|浏览3
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关键词
Micro gas sensor,Pt thin film temperature sensor,CO and HCHO gases
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