Fully embedded photonic crystal cavity with Q=0.6 million fabricated within a full-process CMOS multiproject wafer.

A two dimensional photonic crystal (PhC) resonator, based on a recent design concept, entirely embedded in Silica, is fabricated in a CMOS full-process multiproject wafer, including additional steps such as implantation, metalization, Germanium deposition and planarization. A large loaded Q-factor (5.9 x 10(5)) is achieved without removal of the silica cladding. A statistical analysis over 56 devices leads to an average value for the loaded Q of 4 x 10(5), in close agreement with calculations. An upper boundary for the fabrication disorder is estimated to 1.2 nm. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement