Line-edge Roughness As a Challenge for High-Performance Wire Grid Polarizers in the Far Ultraviolet and BeyondThomas Siefke,Martin Heusinger,Carol B. Rojas Hurtado,Johannes Dickmann,Uwe Zeitner,Andreas Tuennermann,Stefanie KrokerOptics Express(2018)引用 10|浏览30暂无评分关键词Nanophotonic WaveguidesAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要