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Nanostructured Germanium Synthesized by High-Pressure Chemical Vapor Deposition in Mesoporous Silica Templates

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS(2023)

The Pennsylvania State University

Cited 0|Views41
Abstract
Nanostructured semiconductors are interesting because of their varied electronic and optical properties compared to the bulk. Using ordered porous materials as templates is an appealing approach to prepare nanostructured materials. However, the very small pore sizes (< 10 nm) of many mesoporous silicas make traditional deposition methods for germanium difficult, resulting in aggregated particles or voids in the deposited material. To overcome this challenge, high-pressure chemical vapor deposition (HPCVD) has been used to deposit germanium within the pore network of KIT-5 mesoporous silica. This technique allows for smooth, continuous deposition within small, tortuous pore networks. Both crystalline and amorphous materials can be produced, expanding the applicability of the resulting materials for various uses. The resulting nanocrystalline germanium has 5-nm features derived from the parent KIT-5 and is the smallest templated material prepared using HPCVD to date. This work represents the first time a three-dimensional mesoporous silica, with features ≤ 5 nm, has been uniformly filled with a semiconductor.
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Nanocomposite Materials,Ordered Nanoporous Arrays,Pore Structure Characterization,Porous Silicon,Mesoporous Materials
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要点】:该论文创新性地采用高压力化学气相沉积法,在有序多孔的二氧化硅模板中合成了具有纳米结构的锗,解决了传统沉积方法在小于10纳米孔径的多孔硅中难以实现锗均匀沉积的问题,成功制备出具有5纳米特征的纳米晶锗,是迄今为止使用HPCVD方法制备的最小的模板材料。

方法】:研究采用的方法是高压力化学气相沉积(HPCVD)。

实验】:实验中使用了KIT-5多孔硅作为模板,通过HPCVD技术在模板的孔道网络中沉积锗。结果表明,得到的纳米晶锗保持了KIT-5模板的5纳米特征,并且是首次实现三维多孔硅(特征尺寸≤5纳米)均匀填充半导体的研究。