Ppac Scaling Enablement For 5nm Mobile Soc Technology

Mustafa Badaroglu,Jeff Xu,John Zhu,Da Yang,Jerry Bao,Seung-Chul Song,Peijie Feng,Romain Ritzenthaler,Hans Mertens,Geert Eneman,Naoto Horiguchi,Jeffrey Smith,Suman Datta,David Kohen, Po-Wen Chan, Keagan Chen,P. R. Chidi Chidambaram

2017 47TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE (ESSDERC)（2017）

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关键词

5nm, More Moore scaling, process technology, integration, finFET, gate-all-around, nanowire, PPAC

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