Instantaneous Characteristics of MOS Structures

B BALLAND,JJ MARCHAND, P PINARD

Journal of physics E, Scientific instruments(1977)

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摘要
A simple, rapid experimental method is proposed for obtaining the parameters of each MOS device from the profile of the derived curve dCn/dVg of the capacitance-voltage characteristic, which is closely correlated to the level of disorder existing in the I-S interfacial region. A simple reading of the experimental graphs provides the information allowing the systematic, instantaneous characterization of the devices at the time of manufacture or immediately after stress (electron irradiation, temperature).
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