A novel MEMS electromagnetic actuator with large displacementXingdong Lv,Weiwei Wei,Xu Mao,Yu Chen,Jinling Yang,Fuhua YangSensors and Actuators A: Physical(2015)引用 47|浏览14暂无评分关键词MEMS actuator,Lorentz force,Large stroke,High yieldAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要