Low Temperature Chemical Vapour Synthesis of Cu3Ge Thin Films for Interconnect Applications

P. Antony Premkumar,L. Carbonell,M. Schaekers,K. Opsomer,C. Adelmann,O. Richard, H. Bender,A. Franquet,J. Meersschaut, L. Wen,T. Zsolt,S. Van Elshocht

Microelectronic engineering（2014）

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关键词
Metal germanides,Thin films,Chemical vapour synthesis,Physical properties,Thermal stability,Interconnect applications
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