Optical Characterization by Variable Angle Spectroscopic Ellipsometry of Nitrogen-Doped Mg Zn1−O Thin Films Prepared by the Plasma-Assisted Reactive Evaporation Method

Takami Abe,Akira Nakagawa,Michiko Nakagawa,Tetsuya Chiba,Shuzo Takahashi,Yasuhiro Kashiwaba,Shigeki Chiba,Tsutomu Ojima, Katsumi Aota,Masahiro Daibo,Hiroshi Osada,Tamiya Fujiwara,Ikuo Niikura,Yasube Kashiwaba,Kouichi Tsutsumi,Michio Suzuki

Thin solid films（2014）

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关键词

ZnO single crystal,MgZnO film,VASE,Herzinger-Johs model,Extinction coefficient,Refractive index,Absorption coefficient,Plasma-assisted reactive evaporation method

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