Remote plasma sputtering of indium tin oxide thin films for large area flexible electronics

A D Yeadon,S J Wakeham,H Brown,M J Thwaites,M J Whiting,M A Baker

Thin Solid Films（2011）

引用 13|浏览9

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关键词

Sputtering,Indium tin oxide,Ambient,HiTUS,Flexible

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