Efficient optimization of high vacuum chemical vapor deposition of niobium oxide on full wafer scale

Ali Dabirian,Yury Kuzminykh,Scott Harada, Carol A Parsons,Silviu Cosmin Sandu, E Wagner,Giacomo Benvenuti,S A Rushworth,Paul Muralt,P Hoffmann

IOP Conference Series-Materials Science and Engineering（2010）

Cited 4|Views6

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Abstract

A systematic study of niobium oxide deposition using niobium tetraethoxy-dimethyl-amino-ethoxide (Nb(OEt)(4)(dmae)) precursor is presented. The deposition process was conducted in a high-vacuum chemical vapor deposition machine with precursor flux gradient capability. An efficient optimization of the deposition process was achieved and both mass-transport- and chemical-reaction-limited regimes were identified.

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Key words

thin films,mass transport,chemical reaction

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