Conductive Atomic Force Microscopy Probes from Pyrolyzed Parylene

Conductive atomic force microscopy (AFM) probes fabricated from silicon cantilevers coated with pyrolyzed parylene C (PPC) are described. This method offers a simple, inexpensive route to conductive AFM probes made from carbon materials. Fabricated probes were used in current-sensing atomic force microscopy (CS-AFM) to image nanometer-sized, metallic features. Future applications of PPC AFM probes include measurement of in situ corrosion and scanning electrochemical-atomic force microscopy. (C) 2012 The Electrochemical Society. [DOI: 10.1149/2.061207jes] All rights reserved.