Design Of Compact 6-Dof Precision Aligner For Micro-Assembly

This work will develop a 6 Degrees Of Freedom (DOF) precision aligner with a small size and a high resolution for the assembly of the micro-scale parts used in mobile electronics. The arrangement of actuators in the aligner is symmetrical, based on kinematic design. A VCM (Voice Coil Motor) actuator that is small and reliable will be applied to this aligner system. This paper presents the combination of two modules to form the mechanism for the 6-DOF precision aligner. The first is a stage that can control XY theta(Z) motion, while the second can control Z motion, i.e. Z tilt motion. According to its specifications, it is expected to satisfy precision requirements. Several tests will be carried out to confirm the specifications with PID control.