Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And P Langel, Mathias Kirsten,W Riethmuller,B Wenk,G Zwicker,J R Morante,Fredric Ericson,Janake Schweitzmag(1995)引用 23|浏览2暂无评分关键词residual stress,surface micromachining,batch reactorAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要