Uniaxial Strain Enhancement in SOI Technology for the Improvement of Channel and Exterior Resistances

Da Zhang,D. Goedeke,V. Dhandapani,J. Hildreth, C.C. Fu, T. Kropewnicki, A. Lu,M. Jahanbani, H. Martinez,R. Noble,D. Eades, N. Liu,L. Kang,B.-Y. Nguyen,V. Kolagunta,M. Hall,J. Cheek,S. Venkatesan

Meeting abstracts/Meeting abstracts (Electrochemical Society CD-ROM)（2007）

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