Challenges in patterning Mn-12-acetate thin films by electron-beam lithography
Low Temperature Physics(2006)
摘要
We investigate how electron-beam lithography can be applied to pattern Mn-12-acetate thin films produced by a solution evaporation technique. The low temperature magnetic ac-susceptibility data of the powder sample extracted from a film dipped into acetone indicate that some of the molecules in the film are deformed by acetone treatment concluding that acetone is not a proper chemical for the lift-off process, a crucial step in the patterning procedure.
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关键词
molecular magnets,Mn-12-acetate,patterning,magnetic susceptibility
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